The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 2016
Filed:
May. 20, 2011
Robert M. Weikle, Ii, Crozet, VA (US);
Arthur Weston Lichtenberger, Charlottesville, VA (US);
Nicolas Scott Barker, Charlottesville, VA (US);
Theodore James Reck, Charlottesville, VA (US);
Haiyong Xu, Charlottesville, VA (US);
Lihan Chen, Charlottesville, VA (US);
Robert M. Weikle, II, Crozet, VA (US);
Arthur Weston Lichtenberger, Charlottesville, VA (US);
Nicolas Scott Barker, Charlottesville, VA (US);
Theodore James Reck, Charlottesville, VA (US);
Haiyong Xu, Charlottesville, VA (US);
Lihan Chen, Charlottesville, VA (US);
University of Virginia Patent Foundation, Charlottesville, VA (US);
Abstract
A micromachining process to fabricate a single chip that simple drops into a supporting structure. The micromachining process provides the ability to create a probe that will interface with integrated circuits, for example, operating at frequencies in the range of about 100 GHz to about 3,000 GHz (3 THz). This approach creates a silicon structure (or other applicable choice of material) that provides mechanical force for probing while supporting the transfer of the high frequency energy between a measurement system and the integrated circuit, individual device or material.