The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 07, 2016
Filed:
Dec. 27, 2012
Applicant:
Commissariat À L'énergie Atomique ET Aux Énergies Alternatives, Paris, FR;
Inventors:
Assignee:
Primary Examiner:
Int. Cl.
CPC ...
H01L 33/00 (2010.01); H01L 23/00 (2006.01); H01L 21/20 (2006.01); H01L 21/762 (2006.01);
U.S. Cl.
CPC ...
H01L 24/89 (2013.01); H01L 21/2007 (2013.01); H01L 21/76254 (2013.01); H01L 24/27 (2013.01); H01L 24/28 (2013.01); H01L 2224/8003 (2013.01); H01L 2224/80896 (2013.01);
Abstract
The invention relates to a method for manufacturing a multilayer strucute on a first substrate, the method including: using the first substrate made of a first material having a Young's modulus Eand a thickness e, and using a second substrate covered by the multilayer structure, the second substrate being made of a second material having a Young's modulus Ethat is different from the Young's modulus Eand a thickness e, the thicknesses eand ecomplying, plus or minus 10%, with the relation (I); molecularly bonding the first substrate and the multilayer structure together; and removing the second substrate.