The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 07, 2016
Filed:
Feb. 07, 2012
Applicants:
Eugene Maria Brinkhof, Weert, NL;
Jan Bex, Overpelt, BE;
Anko Jozef Cornelus Sijben, Veghel, NL;
Johannes Wilhelmus Damen, Budel, NL;
Inventors:
Eugene Maria Brinkhof, Weert, NL;
Jan Bex, Overpelt, BE;
Anko Jozef Cornelus Sijben, Veghel, NL;
Johannes Wilhelmus Damen, Budel, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70708 (2013.01); G03F 7/70691 (2013.01); H01L 21/6831 (2013.01);
Abstract
An electrostatic clamp for use in holding an object onto a supporting table, the electrostatic clamp comprising: a multi-layer film comprising an electrode defined in an electrically conducting layer which is positioned between electrically insulating layers.