The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 07, 2016
Filed:
Oct. 18, 2013
Fei Company, Hillsboro, OR (US);
Petrus Hubertus Franciscus Trompenaars, Tilburg, NL;
FEI Company, Hillsboro, OR (US);
Abstract
The invention relates to a coated O-ring for forming a seal, in which the core of the O-ring comprises a polymer and/or synthetic rubber, and the coating comprises an inorganic coating with a thickness between 10 nm and 1 μm, resulting in an O-ring that shows a lower permeation than an uncoated O-ring and where the coating shows little or no cracking when the local curvature of the O-ring in any direction is changed by 20%. The coating is preferably applied by Atomic Layer Deposition, but also other deposition techniques such as (PE)CVD, E-beam evaporation, and reactive evaporation may be used. A further elastomer layer may cover the one or more coating layers for further mechanical and/or chemical protection.