The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 07, 2016
Filed:
Aug. 17, 2007
Bioh Kim, Milford, CT (US);
Marvin Bernt, Kalispell, MT (US);
Greg Wilson, Kalispell, MT (US);
Paul R. Mchugh, Kalispell, MT (US);
Bioh Kim, Milford, CT (US);
Marvin Bernt, Kalispell, MT (US);
Greg Wilson, Kalispell, MT (US);
Paul R. McHugh, Kalispell, MT (US);
APPLIED Materials, Inc., Santa Clara, CA (US);
Abstract
Electric potential, current density, agitation, and deposition rate are controlled to deposit metal alloys, such as tin based solder alloys or magnetic alloys, with minimal variations in the weight ratios of alloying metals at different locations within the deposited metal alloy feature. Alternative embodiments include processes that form metal alloy features wherein the variation in weight ratio of alloying metals within the feature is not necessarily minimized, but is controlled to provide a desired variation. In addition to metal alloys, alternative embodiments include processes for improving the deposition of single metal features.