The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 07, 2016
Filed:
Mar. 06, 2014
Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;
Chih-Ming Tsao, Miaoli, TW;
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., Hsinchu, TW;
Abstract
An air washer includes a contamination removal membrane and a nozzle rack. The contamination removal membrane purifies an outdoor air for a clean room. The nozzle rack sprays water on the contamination removal membrane. The nozzle rack includes a supply pipe, a plurality of spray pipes connecting to the supply pipe and a plurality of nozzles fixed on the spray pipes to spray the water on the contamination removal membrane. The contamination removal membrane is a cellulose paper sheet, an agglomeration ceramic pad, a stainless steel filter or the combination thereof. In addition, a make-up air unit having the air washer is also disclosed therein.