The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 31, 2016
Filed:
Nov. 20, 2014
Asml Netherlands B.v., Veldhoven, NL;
Henricus Petrus Maria Pellemans, Veldhoven, NL;
Pavel Stanislavovich Antsiferov, Moscow, RU;
Vladimir Mihailovitch Krivtsun, Moscow, RU;
Johannes Matheus Marie De Wit, Helmond, NL;
Ralph Jozef Johannes Gerardus Anna Maria Smeets, Veldhoven, NL;
Gerbrand Van Der Zouw, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A laser driven light source comprises laser and focusing optics. These produce a beam of radiation focused on a plasma forming zone within a container containing a gas (e.g., Xe). Collection optics collects photons emitted by a plasma maintained by the laser radiation to form a beam of output radiation. Plasma has an elongate form (L>d) and collecting optics is configured to collect photons emerging in the longitudinal direction from the plasma. The brightness of the plasma is increased compared with sources which collect radiation emerging transversely from the plasma. A metrology apparatus using the light source can achieve greater accuracy and/or throughput as a result of the increased brightness. Back reflectors may be provided. Microwave radiation may be used instead of laser radiation to form the plasma.