The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 31, 2016

Filed:

Dec. 22, 2014
Applicant:

Regents of the University of Minnesota, Minneapolis, MN (US);

Inventors:

David J. Norris, Roseville, MN (US);

Sang Eon Han, Cambridge, MA (US);

Prashant Nagpal, Minneapolis, MN (US);

Aditya Bhan, Minneapolis, MN (US);

Nathan Charles Lindquist, Vadnais Heights, MN (US);

Sang-Huyn Oh, Plymouth, MN (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D 3/10 (2006.01); B05D 7/00 (2006.01); H01L 49/00 (2006.01); B81C 99/00 (2010.01); B82Y 10/00 (2011.01); B82Y 40/00 (2011.01); G02B 1/00 (2006.01); G02B 5/00 (2006.01); B81C 1/00 (2006.01); H01L 49/02 (2006.01); G02B 6/122 (2006.01); G03F 7/00 (2006.01); H01L 31/0232 (2014.01); H01L 31/054 (2014.01);
U.S. Cl.
CPC ...
H01L 49/006 (2013.01); B81C 1/00119 (2013.01); B81C 99/009 (2013.01); B82Y 10/00 (2013.01); B82Y 40/00 (2013.01); G02B 1/002 (2013.01); G02B 5/008 (2013.01); G02B 6/1226 (2013.01); H01L 49/02 (2013.01); G03F 7/0002 (2013.01); H01L 31/02327 (2013.01); H01L 31/054 (2014.12); Y10T 428/12486 (2015.01); Y10T 428/12493 (2015.01); Y10T 428/12507 (2015.01);
Abstract

The present invention provides templating methods for replicating patterned metal films from a template substrate such as for use in plasmonic devices and metamaterials. Advantageously, the template substrate is reusable and can provide plural copies of the structure of the template substrate. Because high-quality substrates that are inherently smooth and flat are available, patterned metal films in accordance with the present invention can advantageously provide surfaces that replicate the surface characteristics of the template substrate both in the patterned regions and in the unpatterned regions.


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