The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 31, 2016
Filed:
Oct. 24, 2014
Applicant:
Micron Technology, Inc., Boise, ID (US);
Inventor:
Hiroshi Yoshino, Tokyo, JP;
Assignee:
Micron Technology, Inc., Boise, ID (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/26 (2006.01); H01L 21/66 (2006.01); G03F 7/20 (2006.01); H01L 27/108 (2006.01);
U.S. Cl.
CPC ...
H01L 22/30 (2013.01); G03F 7/70633 (2013.01); H01L 27/10885 (2013.01); H01L 2924/0002 (2013.01);
Abstract
Disclosed herein is a semiconductor device that includes a plurality of segment regions arranged with a first distance, each of segment regions including a plurality of first grooves arranged with a second distance that is smaller than the first distance, and a second groove enclosing the plurality of the segment regions with a third distance that is larger than the second distance. The third distance may be substantially equal to the first direction.