The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 31, 2016
Filed:
Dec. 27, 2011
Teruaki Konishi, Koshi, JP;
Takahiro Tetsuka, Koshi, JP;
Teruaki Konishi, Koshi, JP;
Takahiro Tetsuka, Koshi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
Liquid processing unitseach for performing a liquid process on a substrate are arranged horizontally side by side, a gas exhaust pipefor exhausting an atmosphere within the liquid processing units is provided under the liquid processing unitsto be extended along an arrangement of the liquid processing units, and a flow control member groupis disposed under the gas exhaust pipe. Liquid supply main pipeand liquid drain main pipeare provided under the flow control member groupto be extended along the arrangement of the liquid processing units. Liquid supply branch pipes are branched from the liquid supply main pipeand connected with the liquid processing unitvia the flow control member group, and liquid drain branch pipes are branched from the liquid drain main pipeand connected with the liquid processing unit