The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 31, 2016

Filed:

Jul. 23, 2014
Applicant:

Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;

Inventors:

Takashi Nagamine, Kawasaki, JP;

Yoshitaka Komuro, Kawasaki, JP;

Masatoshi Arai, Kawasaki, JP;

Yoshiyuki Utsumi, Kawasaki, JP;

Assignee:

TOKYO OHKA KOGYO CO., LTD., Kawasaki-Shi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C07C 381/12 (2006.01); G03F 7/039 (2006.01); G03F 7/027 (2006.01); G03F 7/30 (2006.01); G03F 7/038 (2006.01); C08F 224/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/027 (2013.01); C07C 381/12 (2013.01); C08F 224/00 (2013.01); G03F 7/038 (2013.01); G03F 7/30 (2013.01);
Abstract

A resist composition containing a compound represented by general formula (m0), wherein Rand Reach independently represents an aryl group which may have a substituent, an alkyl group which may have a substituent, or an alkenyl group which may have a substituent, provided that Rand Rmay be mutually bonded to form a ring with the sulfur atom; Rrepresents an aromatic hydrocarbon group which may have a substituent, an alkenyl group which may have a substituent, or an alkynyl group which may have a substituent; Vrepresents a single bond or an alkylene group, provided that, when Ris an aromatic hydrocarbon group which may have a substituent, Vis an alkylene group; and X0represents a monovalent organic anion.


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