The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2016
Filed:
Oct. 20, 2015
Applicant:
Gigaphoton Inc., Tochigi, JP;
Inventors:
Masaki Nakano, Oyama, JP;
Osamu Wakabayashi, Oyama, JP;
Assignee:
GIGAPHOTON INC., Tochigi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05G 2/00 (2006.01); H01L 21/66 (2006.01); H01L 21/268 (2006.01); G03F 7/20 (2006.01); B05B 17/06 (2006.01); B05B 12/02 (2006.01);
U.S. Cl.
CPC ...
H05G 2/006 (2013.01); B05B 12/02 (2013.01); B05B 17/0607 (2013.01); B05B 17/0615 (2013.01); G03F 7/70033 (2013.01); G03F 7/70041 (2013.01); G03F 7/7085 (2013.01); H01L 21/268 (2013.01); H01L 22/10 (2013.01); H05G 2/003 (2013.01); H05G 2/008 (2013.01);
Abstract
A target supply device may include a reservoir configured to hold a target material in its interior in liquid form, a vibrating element configured to apply vibrations to the reservoir, a target sensor configured to detect droplets of the target material outputted from the reservoir, a control unit configured to set parameters based on a result of the detection performed by the target sensor, a function generator configured to generate an electrical signal having a waveform based on the parameters, and a power source configured to apply a driving voltage to the vibrating element in accordance with the electrical signal.