The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 24, 2016

Filed:

Jun. 06, 2013
Applicant:

Mitutoyo Corporation, Kawasaki-shi, Kanagawa-ken, JP;

Inventors:

Mark Lawrence Delaney, Shoreline, WA (US);

Paul Gerard Gladnick, Seattle, WA (US);

Assignee:

Mitutoyo Corporation, Kawasaki-shi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H04N 5/235 (2006.01); H04N 5/225 (2006.01); G01N 21/00 (2006.01); H04N 5/265 (2006.01);
U.S. Cl.
CPC ...
H04N 5/2354 (2013.01); G01N 21/00 (2013.01); H04N 5/2256 (2013.01);
Abstract

A method for controlling a structured illumination pattern generating portion is provided for illuminating a workpiece during an image acquisition by a camera in a precision machine vision inspection system. A controllable spatial light modulator (e.g., a digital light processing projector) is part of the generating portion for generating the structured illumination pattern. The pattern may comprise an array of stripes including a sinusoidal gray level intensity variation across each stripe. An overall image exposure is increased by repeating a complete structured illumination pattern generation iteration, including gray level variation, a plurality of times during an image integration period. Structured illumination microscopy techniques for determining a workpiece surface profile may benefit, wherein multiple (e.g., 3 or 4) images are acquired at respective focus positions to be analyzed, by using the method to project a different phase of a structured light pattern for each of the multiple images.


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