The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 24, 2016

Filed:

May. 30, 2012
Applicants:

Kihoon Choi, Cheonan-si, KR;

Byung Man Kang, Cheonan-si, KR;

Byung Chul Kang, Cheonan-si, KR;

Donghyuk Jang, Cheonan-si, KR;

Inventors:

Kihoon Choi, Cheonan-si, KR;

Byung Man Kang, Cheonan-si, KR;

Byung Chul Kang, Cheonan-si, KR;

Donghyuk Jang, Cheonan-si, KR;

Assignee:

SEMES CO., LTD., Chungcheongnam-Do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67769 (2013.01); H01L 21/67173 (2013.01); H01L 21/67178 (2013.01);
Abstract

Provided is a buffer unit, which includes a frame including a base plate, a first vertical plate, and a second vertical plate, wherein the first and second vertical plates are spaced apart from each other on the base plate, a first buffer on which a photomask is placed, the first buffer being allowed to be reversed between the first and second vertical plates; and a plurality of driving parts disposed at outsides of the first and second vertical plates, and driving the first buffer to grip and reverse the photomask placed on the first buffer.


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