The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2016
Filed:
Feb. 11, 2015
Jeol Ltd., Tokyo, JP;
Takaki Ishikawa, Tokyo, JP;
Kazunori Somehara, Tokyo, JP;
JEOL Ltd., Tokyo, JP;
Abstract
A charged particle beam system capable of suppressing drift of a functional component used in association with a sample is offered. The charged particle beam system () images the sample (S) by irradiating the sample with a charged particle beam (EB). The system includes the functional component (such as a sample holder ()), drive portions () for moving the sample holder (), and a controller () for controlling the drive portions (). The controller () controls the drive portions () to vibrate the sample holder () such that its amplitude is driven to decrease with time.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile