The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2016
Filed:
Mar. 26, 2014
Applicant:
Jeol Ltd., Tokyo, JP;
Inventor:
Shuichi Yuasa, Tokyo, JP;
Assignee:
JEOL Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/18 (2006.01); H01J 37/20 (2006.01); H01J 37/16 (2006.01);
U.S. Cl.
CPC ...
H01J 37/185 (2013.01); H01J 37/16 (2013.01); H01J 37/20 (2013.01); H01J 2237/184 (2013.01);
Abstract
A sample introduction device () is adapted to introduce a sample (S) into the sample chamber () of a charged particle beam instrument. The device includes: a pre-evacuation chamber () for performing a pre-evacuation; a sample holder () having a sample holding portion () capable of holding the sample (S); a support portion () for supporting the sample holder (); mechanical drives (); and goniometer () for moving and rotating the support portion () such that the sample holding portion () moves from inside the pre-evacuation chamber () into the sample chamber (). Partition valve () can be activated by the action of the goniometer.