The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 24, 2016

Filed:

Apr. 16, 2015
Applicant:

Jeol Ltd., Tokyo, JP;

Inventor:

Hidetaka Sawada, Tokyo, JP;

Assignee:

JEOL Ltd., Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G21K 5/04 (2006.01); H01J 37/141 (2006.01); H01J 37/06 (2006.01); H01J 37/26 (2006.01);
U.S. Cl.
CPC ...
H01J 37/141 (2013.01); H01J 37/06 (2013.01); H01J 37/26 (2013.01); H01J 2237/063 (2013.01); H01J 2237/1415 (2013.01);
Abstract

A multipole lens () which can produce static magnetic fields showing different strengths in the direction of travel of an electron beam has lens subasssemblies () stacked on top of each other. The lens subassemblies () have yokes (), respectively, and polar elements (), respectively. The polar elements () have base portions (), respectively, magnetically coupled to the yokes (), respectively, and front end portions (), respectively, magnetically coupled to the base portions (), respectively. Magnetic field separators () made of a nonmagnetic material are mounted between the front end portions () which are successively adjacent to each other in the direction of stacking of the lens subassemblies ().


Find Patent Forward Citations

Loading…