The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2016
Filed:
Apr. 06, 2015
Applicant:
Renesas Electronics Corporation, Kanagawa, JP;
Inventors:
Assignee:
RENESAS ELECTRONICS CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/108 (2006.01); G11C 16/12 (2006.01); H01L 27/115 (2006.01); H01L 29/788 (2006.01); H01L 21/3065 (2006.01); H01L 21/308 (2006.01); H01L 21/3105 (2006.01); H01L 21/311 (2006.01); H01L 21/02 (2006.01); H01L 21/28 (2006.01); G11C 16/14 (2006.01); G11C 16/08 (2006.01); G11C 16/26 (2006.01);
U.S. Cl.
CPC ...
G11C 16/12 (2013.01); G11C 16/08 (2013.01); G11C 16/14 (2013.01); G11C 16/26 (2013.01); H01L 21/02164 (2013.01); H01L 21/02238 (2013.01); H01L 21/28167 (2013.01); H01L 21/28273 (2013.01); H01L 21/3065 (2013.01); H01L 21/3086 (2013.01); H01L 21/31053 (2013.01); H01L 21/31111 (2013.01); H01L 27/11524 (2013.01); H01L 27/11531 (2013.01); H01L 27/11558 (2013.01); H01L 29/7883 (2013.01); H01L 21/02255 (2013.01);
Abstract
To enhance the write speed of a nonvolatile memory. A charge injection/emission part of a nonvolatile memory cell includes an active region having an upper face, a side wall, and a shoulder part connecting the upper face and the side wall, a conductor film covering the upper face and the shoulder part of the active region, and a capacitance insulating film provided between the conductor film and the active region. Furthermore, the active region has a protrusion part constituted of a first concave part with respect to the upper face and a second concave part with respect to the side wall, in the shoulder part.