The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2016
Filed:
Sep. 21, 2011
Peter Richard Helmus, New Milford, CT (US);
Matthew Lipson, Stamford, CT (US);
Ronald A. Wilklow, Fairfield, CT (US);
James Kennon, Benicia, CA (US);
Kennard White, El Cerrito, CA (US);
Wilbur Jordan Reichmann, Ii, San Pablo, CA (US);
Peter Richard Helmus, New Milford, CT (US);
Matthew Lipson, Stamford, CT (US);
Ronald A. Wilklow, Fairfield, CT (US);
James Kennon, Benicia, CA (US);
Kennard White, El Cerrito, CA (US);
Wilbur Jordan Reichmann, II, San Pablo, CA (US);
ASML HOLDING N.V., Veldhoven, NL;
Abstract
An electrostatic clamp for use in a lithographic apparatus includes burls and an electrode surrounded by an insulator and/or a dielectric material between adjacent burls. In an embodiment, two or more layers of dielectric material are provided between adjacent burls and surround an electrode provided between adjacent burls. The electrostatic clamp may be used to clamp an object to an object support in a lithographic apparatus.