The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 17, 2016
Filed:
Oct. 24, 2014
Applicant:
Samsung Display Co., Ltd., Yongin, Gyeonggi-Do, KR;
Inventors:
Jung-Soo Lee, Seoul, KR;
Jeong-Min Park, Seoul, KR;
Sung-Kyun Park, Suwon-si, KR;
Jun Chun, Yongin-si, KR;
Ki-Hyun Cho, Suwon-so, KR;
Ji-Hyun Kim, Suwon-si, KR;
Dong-Min Kim, Hwaseong-si, KR;
Seung-Ki Kim, Hwaseong-si, KR;
Eun Jeagal, Hwaseong-si, KR;
Assignee:
SAMSUNG DISPLAY CO., LTD., Yongin, Gyeonggi-Do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/023 (2006.01); G03F 7/075 (2006.01); H01L 21/311 (2006.01); H01L 29/66 (2006.01); G03F 7/022 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66969 (2013.01); G03F 7/0226 (2013.01); G03F 7/0236 (2013.01); G03F 7/0751 (2013.01); G03F 7/0755 (2013.01); G03F 7/0757 (2013.01); H01L 21/31144 (2013.01);
Abstract
A photoresist composition, a method of forming a pattern, and a method of manufacturing a thin film transistor substrate, the composition including a solvent, a novolak resin, a diazide-based photo-sensitizer, an acryl compound represented by the following Chemical Formula 1: