The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 17, 2016
Filed:
Feb. 10, 2014
Globalfoundries Singapore Pte. Ltd., Singapore, SG;
Yanzhe Tang, Singapore, SG;
GLOBALFOUNDRIES Singapore Pte. Ltd., Singapore, SG;
Abstract
A device and method of forming the device using a split gate embedded memory technology are presented. The device includes two polysilicon layers, one for floating gate poly and the other for logic, HV and stack gate and split gate. An oxide-nitride-oxide process of the manufacturing method results in low reliability risk and good uniformity in the device. Moreover, embodiments of the manufacturing method have good controllability of the profile and critical dimension of select gates in production. Furthermore, there is no need to provide non-volatile memory and high-voltage protection for devices manufactured by embodiments of the manufacturing method of the present disclosure.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile