The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 17, 2016
Filed:
Jun. 18, 2010
Applicants:
Kenji Nakahira, Fujisawa, JP;
Atsushi Miyamoto, Yokohama, JP;
Inventors:
Kenji Nakahira, Fujisawa, JP;
Atsushi Miyamoto, Yokohama, JP;
Assignee:
HITACHI HIGH-TECHNOLOGIES CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/225 (2006.01); H01J 37/26 (2006.01); H01J 37/28 (2006.01); G06T 5/00 (2006.01);
U.S. Cl.
CPC ...
G01N 23/2251 (2013.01); G01N 23/2255 (2013.01); G06T 5/001 (2013.01); H01J 37/265 (2013.01); H01J 37/28 (2013.01); G06T 2207/10061 (2013.01); G06T 2207/20012 (2013.01); G06T 2207/20021 (2013.01); G06T 2207/30148 (2013.01); H01J 2237/221 (2013.01); H01J 2237/2815 (2013.01); H01J 2237/2817 (2013.01);
Abstract
A high-performance image quality improvement process, capable of improving the image quality of low-definition areas (lower layer patterns in a multilayer, bottoms of holes in a hole pattern, etc.), is performed to a captured image. Definition enhancement intensity is calculated using height information included in design data or estimate values of sample height information calculated from the captured image, and the image quality improvement process is performed to the captured image using the definition enhancement intensity.