The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 17, 2016
Filed:
Nov. 04, 2010
Haruhiko Nishikage, Kyoto, JP;
Toma Fujita, Kyoto, JP;
Haruhiko Nishikage, Kyoto, JP;
Toma Fujita, Kyoto, JP;
ROHM CO., LTD, Kyoto, JP;
Abstract
A pressure sensorcomprises a semiconductor substrate, insulating layersformed on the semiconductor substrate, a semiconductor layerformed on the semiconductor substratewith the insulating layersintervening therebetween, and a cavity portionprovided between the semiconductor substrateand the semiconductor layer. The portion of the semiconductor layerwhich overlaps the cavity portionas viewed in a lamination direction serves as a movable portion. The cavity portionis surrounded by the insulating layers. With this arrangement, the pressure sensorcan be manufactured easily with high precision.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile