The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 2016
Filed:
Dec. 31, 2014
Macronix International Co., Ltd., Hsinchu, TW;
Chun-Ling Chiang, Hsinchu, TW;
Chun-Min Cheng, Hsinchu, TW;
MACRONIX International Co., Ltd., Hsinchu, TW;
Abstract
A method of fabricating a semiconductor device, including the following steps. A plurality of fin structures are formed on a substrate. There is a trench between the fin structures. At least two times of circulating processes are performed. The circulating processes include: a deposition process and an etching process. The deposition process is performed to fill a first conductor material layer in the trench. The first conductor material layer covers top parts and sidewalls of the fin structures. The etching process is performed to remove a part of the first conductor material layer.