The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 2016
Filed:
Sep. 12, 2013
Applicant:
Lintec Corporation, Tokyo, JP;
Inventors:
Assignee:
LINTEC Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/30 (2006.01); H01J 37/317 (2006.01); C23C 14/48 (2006.01); H05H 1/46 (2006.01); H01J 37/32 (2006.01); C23C 14/56 (2006.01); H05H 1/48 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3171 (2013.01); C23C 14/48 (2013.01); C23C 14/562 (2013.01); H01J 37/32 (2013.01); H01J 37/3277 (2013.01); H01J 37/32412 (2013.01); H05H 1/46 (2013.01); H01J 2237/006 (2013.01); H01J 2237/18 (2013.01); H01J 2237/31701 (2013.01); H05H 2001/485 (2013.01);
Abstract
The disclosed ion implantation apparatus has a vacuum chamber, a roller electrodehaving a portion of an outer circumferential part on which a filmis wound, voltage application unitfor applying a voltage to the roller electrode, and a gas introduction unit having a gas supply outlet for supplying an ion implantation gas into the vacuum chamber, wherein the gas introduction unit and a gas discharge outlet are disposed so as to be opposite each other along the axial direction of the roller electrode, the roller electrode intervening therebetween.