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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9336991 B1

PDFFull Text
Date of Patent:
May. 10, 2016

Filed:

Sep. 12, 2013

Ion implantation device

Applicant:

Lintec Corporation, Tokyo, JP;

Inventors:

Satoshi Naganawa, Tokyo, JP;

Daisuke Goto, Tokyo, JP;

Suguru Kenmochi, Tokyo, JP;

Assignee:

LINTEC Corporation, Tokyo, JP;

Attorney:

Young & Thompson

Primary Examiner:

Nicole Ippolito

Int. Cl.
CPC ...
H01J 37/30 (2006.01); H01J 37/317 (2006.01); C23C 14/48 (2006.01); H05H 1/46 (2006.01); H01J 37/32 (2006.01); C23C 14/56 (2006.01); H05H 1/48 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3171 (2013.01); C23C 14/48 (2013.01); C23C 14/562 (2013.01); H01J 37/32 (2013.01); H01J 37/3277 (2013.01); H01J 37/32412 (2013.01); H05H 1/46 (2013.01); H01J 2237/006 (2013.01); H01J 2237/18 (2013.01); H01J 2237/31701 (2013.01); H05H 2001/485 (2013.01);
Abstract

The disclosed ion implantation apparatus has a vacuum chamber, a roller electrodehaving a portion of an outer circumferential part on which a filmis wound, voltage application unitfor applying a voltage to the roller electrode, and a gas introduction unit having a gas supply outlet for supplying an ion implantation gas into the vacuum chamber, wherein the gas introduction unit and a gas discharge outlet are disposed so as to be opposite each other along the axial direction of the roller electrode, the roller electrode intervening therebetween.

Find Patent Forward Citations

Naganawa, Satoshi. (2016). Ion implantation device (U.S. Patent No. 9336991). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9336991

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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