The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 2016
Filed:
Jul. 16, 2009
Henricus Gerardus Tegenbosch, Eindhoven, NL;
Alexander Matthijs Struycken, Eindhoven, NL;
Jacob Kleijn, Wintelre, NL;
Ruud Antonius Catharina Maria Beerens, Roggel, NL;
Ivo Vanderhallen, Eindhoven, NL;
Henricus Gerardus Tegenbosch, Eindhoven, NL;
Alexander Matthijs Struycken, Eindhoven, NL;
Jacob Kleijn, Wintelre, NL;
Ruud Antonius Catharina Maria Beerens, Roggel, NL;
Ivo Vanderhallen, Eindhoven, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A mount configured to mount an optical element in a module for a lithographic apparatus. The mount includes a plurality of resilient members constructed and arranged to circumferentially support the optical element. Each resilient member includes a plurality of resilient subsections that are configured to engage the optical element around a perimeter thereof. Each resilient subsection is configured to flex independent of another resilient subsection.