The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 03, 2016

Filed:

Dec. 06, 2013
Applicant:

Headway Technologies, Inc., Milpitas, CA (US);

Inventors:

Cheng T. Horng, San Jose, CA (US);

Ru-Ying Tong, Los Gatos, CA (US);

Guangli Liu, Pleasonton, CA (US);

Robert Beach, Los Gatos, CA (US);

Witold Kula, Sunnyvale, CA (US);

Tai Min, San Jose, CA (US);

Assignee:

Headway Technologies, Inc., Milpitas, CA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 43/12 (2006.01); C23C 14/34 (2006.01); G11C 11/16 (2006.01); B82Y 25/00 (2011.01);
U.S. Cl.
CPC ...
H01L 43/12 (2013.01); B82Y 25/00 (2013.01); C23C 14/3414 (2013.01); G11C 11/16 (2013.01); Y10T 428/1114 (2015.01);
Abstract

A STT-RAM MTJ is disclosed with a MgO tunnel barrier formed by natural oxidation and containing an oxygen surfactant layer to form a more uniform MgO layer and lower breakdown distribution percent. A CoFeB/NCC/CoFeB composite free layer with a middle nanocurrent channel layer minimizes Jcwhile enabling thermal stability, write voltage, read voltage, and Hc values that satisfy 64 Mb design requirements. The NCC layer has RM grains in an insulator matrix where R is Co, Fe, or Ni, and M is a metal such as Si or Al. NCC thickness is maintained around the minimum RM grain size to avoid RM granules not having sufficient diameter to bridge the distance between upper and lower CoFeB layers. A second NCC layer and third CoFeB layer may be included in the free layer or a second NCC layer may be inserted below the Ru capping layer.


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