The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 03, 2016

Filed:

Jan. 28, 2013
Applicant:

First Solar, Inc., Tempe, AZ (US);

Inventors:

Max William Reed, Niwot, CO (US);

Stacy Ann Black, Longmont, CO (US);

Scott Daniel Feldman-Peabody, Golden, CO (US);

Mark Jeffrey Pavol, Arvada, CO (US);

Assignee:

First Solar, Inc., Tempe, AZ (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D 5/12 (2006.01); H01L 31/18 (2006.01); C23C 14/06 (2006.01); C23C 14/24 (2006.01); C23C 14/56 (2006.01);
U.S. Cl.
CPC ...
H01L 31/1876 (2013.01); C23C 14/0629 (2013.01); C23C 14/24 (2013.01); C23C 14/562 (2013.01); H01L 31/1828 (2013.01); Y02E 10/543 (2013.01); Y02P 70/521 (2015.11);
Abstract

A method for vapor deposition of a sublimated source material, such as CdTe, onto substrates in a continuous, non-stop manner through the apparatus is provided. The sublimated source material moves through a distribution plate and deposits onto the upper surface of the substrates as they are conveyed through the deposition area. The substrates move into and out of the deposition area through entry and exit slots that are defined by transversely extending entrance and exit seals. The seals are disposed at a gap distance above the upper surface of the substrates that is less than the distance or spacing between the upper surface of the substrates and the distribution plate. The seals have a ratio of longitudinal length (in the direction of conveyance of the substrates) to gap distance of from about 10:1 to about 100:1.


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