The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 03, 2016

Filed:

Jun. 30, 2014
Applicant:

Advantest Corporation, Tokyo, JP;

Inventors:

Yuki Endo, Tokyo, JP;

Yasuo Furukawa, Tokyo, JP;

Tomoaki Ueda, Kyoto, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 27/02 (2006.01);
U.S. Cl.
CPC ...
G01R 27/02 (2013.01);
Abstract

A measurement auxiliary circuit is configured to form a resonance circuit together with a detection target. An ATAC is coupled with the resonance circuit. A signal generator applies an AC probe signal Vto the resonance circuit. After the impedance measurement apparatus enters a stable state, an impedance detection unit measures a voltage at at least one node and/or a current that flows through at least one current path. The impedance detection unit detects the impedance of the detection target based on the measurement value.


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