The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 03, 2016
Filed:
Jan. 17, 2013
Applicant:
Brewer Science Inc., Rolla, MO (US);
Inventors:
Assignee:
Brewer Science Inc., Rolla, MO (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/11 (2006.01); G03F 7/40 (2006.01); C09D 5/00 (2006.01); G03F 7/30 (2006.01); G03F 7/09 (2006.01); C07D 303/23 (2006.01); C07C 69/76 (2006.01); C07C 69/94 (2006.01); H01L 21/027 (2006.01);
U.S. Cl.
CPC ...
C09D 5/006 (2013.01); C07C 69/76 (2013.01); C07C 69/94 (2013.01); C07D 303/23 (2013.01); G03F 7/091 (2013.01); G03F 7/094 (2013.01); G03F 7/30 (2013.01); G03F 7/40 (2013.01); C07C 2103/24 (2013.01); C07C 2103/74 (2013.01); H01L 21/0276 (2013.01); Y10T 428/265 (2015.01); Y10T 428/31511 (2015.04); Y10T 428/31525 (2015.04); Y10T 428/31529 (2015.04);
Abstract
Nonpolymeric compounds, compositions, and methods for forming microelectronic structures, and the structures formed therefrom are provided. The nonpolymeric compounds are ring-opened, epoxide-adamantane derivatives that comprise at least two epoxy moieties and at least one adamantyl group, along with at least one chemical modification group, such as a chromophore, bonded to a respective epoxy moiety. Anti-reflective and/or planarization compositions can be formed using these compounds and used in lithographic processes, including fabrication of microelectronic structures.