The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 26, 2016

Filed:

Aug. 16, 2012
Applicants:

Yoshihide Ishii, Kumagaya, JP;

Masayuki Mochizuki, Kumagaya, JP;

Yoshihiro Kurihara, Kumagaya, JP;

Inventors:

Yoshihide Ishii, Kumagaya, JP;

Masayuki Mochizuki, Kumagaya, JP;

Yoshihiro Kurihara, Kumagaya, JP;

Assignee:

Fasford Technology Co., Ltd., Minami-Alps, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B29C 65/48 (2006.01); H01L 23/00 (2006.01);
U.S. Cl.
CPC ...
H01L 24/75 (2013.01); H01L 2224/75702 (2013.01);
Abstract

A two-shaft drive mechanism includes a processing unit, a first linear motor provided with a first movable portion and a first fixed portion, which elevates the processing unit along a first linear guide, and a second linear motor provided with a second movable portion and a second fixed portion, which moves the processing unit in a horizontal direction vertical to the direction for elevating the processing unit, a support body that fixes the first fixed portion, a second linear guide that is provided between the support body and the second fixed portion, and allows the second fixed portion to freely move, and a control unit that controls a position of the first movable portion in the horizontal direction based on an output of the linear sensor that detects a position of the first movable portion in a horizontal direction with respect to the support body.


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