The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 26, 2016
Filed:
Nov. 08, 2010
Applicants:
Gerardo A. Brucker, Longmont, CO (US);
Kenneth D. Van Antwerp, Jr., Colorado Springs, CO (US);
Inventors:
Gerardo A. Brucker, Longmont, CO (US);
Kenneth D. Van Antwerp, Jr., Colorado Springs, CO (US);
Assignee:
MKS Instruments, Inc., Andover, MA (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01M 3/34 (2006.01); G01L 21/02 (2006.01); G01M 3/22 (2006.01); G01M 3/20 (2006.01);
U.S. Cl.
CPC ...
G01M 3/226 (2013.01); G01M 3/205 (2013.01); G01M 3/34 (2013.01);
Abstract
A gas analyzer for a vacuum chamber includes processing electronics configured to receive mass spectral data, receive input of total pressure in the vacuum chamber, receive external input from at least one sensor, and employ the mass spectral data, the total pressure in the vacuum chamber, and the external input from the at least one sensor to calculate a vacuum quality index based on at least one criteria of quality.