The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 19, 2016
Filed:
Nov. 12, 2015
Applicants:
Eun-ok Lee, Suwon-si, KR;
Nam-gun Kim, Suwon-si, KR;
Gyuhwan OH, Hwasung-si, KR;
Heesook Park, Hwasung-si, KR;
Hyun-jung Lee, Suwon-si, KR;
Kyungho Jang, Hwasung-si, KR;
Inventors:
Eun-Ok Lee, Suwon-si, KR;
Nam-Gun Kim, Suwon-si, KR;
Gyuhwan Oh, Hwasung-si, KR;
Heesook Park, Hwasung-si, KR;
Hyun-Jung Lee, Suwon-si, KR;
Kyungho Jang, Hwasung-si, KR;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/768 (2006.01);
U.S. Cl.
CPC ...
H01L 21/7682 (2013.01); H01L 21/76889 (2013.01); H01L 21/76895 (2013.01);
Abstract
A spacer covering a sidewall of a contact plug includes a relatively more damaged first portion and a relatively less damaged second portion. An interface of the first and second portions of the spacer is spaced apart from a metal silicide layer of the contact plug. Thus reliability of the semiconductor device may be improved. Related fabrication methods are also described.