The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 19, 2016
Filed:
Oct. 09, 2012
Applicant:
Kla-tencor Corporation, Milpitas, CA (US);
Inventors:
Anant Chimmalgi, San Jose, CA (US);
Anatoly Shchemelinin, Pleasanton, CA (US);
Ilya Bezel, Sunnyvale, CA (US);
Rajeev Patil, Fremont, CA (US);
Assignee:
KLA-Tencor Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 61/52 (2006.01); H01J 61/28 (2006.01); H01J 65/04 (2006.01);
U.S. Cl.
CPC ...
H01J 61/526 (2013.01); H01J 61/28 (2013.01); H01J 65/04 (2013.01);
Abstract
A refillable plasma cell for use in a laser-sustained plasma light source includes a plasma bulb, the bulb being formed from a glass material substantially transparent to a selected wavelength of radiation, and a gas port assembly, the gas port assembly being operably connected to the bulb and disposed at a first portion of the gas bulb, wherein the bulb is configured to selectively receive a gas from a gas source via the gas port assembly.