The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 19, 2016
Filed:
Dec. 04, 2014
Disco Corporation, Tokyo, JP;
Takashi Mori, Tokyo, JP;
Shinichi Namioka, Tokyo, JP;
Masaaki Nagashima, Tokyo, JP;
Hidetaka Ochi, Tokyo, JP;
Naoto Takata, Tokyo, JP;
Masaaki Suzuki, Tokyo, JP;
Hirotoshi Hoshikawa, Tokyo, JP;
Osamu Miura, Tokyo, JP;
Noriko Ito, Tokyo, JP;
Disco Corporation, Tokyo, JP;
Abstract
A grinding apparatus for grinding a wafer stored in a cassette composed of a container for storing the wafer and a lid for enclosing the container. The grinding apparatus includes a cassette table for placing the cassette thereon, a lid removing unit for removing the lid from the cassette placed on the cassette table and leaving only the container on the cassette table, a chuck table for holding the wafer under suction, a chuck table moving unit for moving the chuck table to a grinding area, a grinding unit provided in the grinding area, the grinding unit having a grinding wheel for grinding the wafer held on the chuck table, a grinding water supplying unit for supplying a grinding water to abrasive members of the grinding wheel, and a waste water collecting unit for collecting waste water generated in grinding the wafer by operating the grinding unit.