The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 19, 2016
Filed:
Jun. 19, 2013
Board of Regents, the University of Texas System, Austin, TX (US);
Carlton Grant Willson, Austin, TX (US);
Christopher John Ellison, Austin, TX (US);
Takehiro Seshimo, Austin, TX (US);
Julia Cushen, Austin, TX (US);
Christopher M Bates, Austin, TX (US);
Leon Dean, Spokane, WA (US);
Logan J Santos, Austin, TX (US);
Erica L Rausch, Austin, TX (US);
Michael Maher, Austin, TX (US);
Board of Regents, The University of Texas System, Austin, TX (US);
Abstract
The use of self-assembled block copolymer structures to produce advanced lithographic patterns relies on control of the orientation of these structures in thin films. In particular, orientation of cylinders and lamellae perpendicular to the plane of the block copolymer film is required for most applications. The preferred method to achieve orientation is by heating. The present invention involves the use of polarity-switching top coats to control block copolymer thin film orientation by heating. The top coats can be spin coated onto block copolymer thin films from polar casting solvents and they change composition upon thermal annealing to become 'neutral'. Top coats allow for the facile orientation control of block copolymers which would otherwise not be possible by heating alone.