Integrated circuits with finfet nonvolatile memory

Abstract

Integrated circuits and methods for producing the same are provided. A method for producing an integrated circuit includes forming a first and second fin overlying a substrate, where the first and second fins intersect at a fin intersection. The first fin has a first fin left end. A tunnel dielectric and a floating gate are formed adjacent to the first fin with the tunnel dielectric between the floating gate and the first fin. An interpoly dielectric is formed adjacent to the floating gate, and a control gate is formed adjacent to the interpoly dielectric such that the interpoly dielectric is between the floating gate and the control gate. The control gate, interpoly dielectric, floating gate, and the tunnel dielectric are removed from over the first fin except for at a floating gate position between the first fin left end and the fin intersection.