The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 12, 2016
Filed:
Jul. 09, 2012
Hisanao Akima, Tokyo, JP;
Yoichi Hirayama, Tokyo, JP;
Hisanao Akima, Tokyo, JP;
Yoichi Hirayama, Tokyo, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
This charged particle beam device comprises: an electron beam source (); a charged particle optical system that includes an object lens () and that irradiates a sample () with electrons emitted from the electron beam source () as an electron beam (); an aberration corrector () that corrects aberrations in the charged particle optical system; and a control unit () that controls the components of the charged particle optical system and the aberration corrector (). The charged particle beam device further comprises an automatic aberration-correcting device () that autonomously acquires, through leaning, optimum adjustment procedures in order to reduce the time required for correcting parasitic aberrations that arise in the aberration corrector ().
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile