The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 12, 2016
Filed:
Jul. 02, 2014
Carl Zeiss Microscopy Gmbh, Jena, DE;
Joerg Fober, Heuchlingen, DE;
Edgar Fichter, Unterkochen, DE;
Kai Schubert, Oberkochen, DE;
Dirk Preikszas, Oberkochen, DE;
Christian Hendrich, Westhausen, DE;
Momme Mommsen, Oberkochen, DE;
Michael Schnell, Rechberghausen, DE;
Lorenz Lechner, Koenigsbronn, DE;
Carl Zeiss Microscopy GmbH, Jena, DE;
Abstract
A particle beam device comprises a beam generator for generating a particle beam having charged particles and an electrode unit having a first electrode and a second electrode, wherein the first electrode interacts with the second electrode, in particular for guiding, shaping, aligning or correcting the particle beam. Moreover, the particle beam device comprises a low-pass filter being connected with at least one of: the first electrode and the second electrode, using an electrical connection. Additionally, the particle beam device comprises a mounting unit having an opening for the passage of the particle beam, wherein the at least one low-pass filter, the first electrode and the second electrode are arranged at the mounting unit. The electrode unit may comprise more than two electrodes, for example up to 16 electrodes.