The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 12, 2016
Filed:
Jun. 25, 2013
Canon Kabushiki Kaisha, Tokyo, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
The present invention provides an exposure apparatus including a projection device including an object whose at least one of a position, an attitude and a shape is regulatable, and configured to project light from a reticle onto a substrate, a regulating device configured to regulate the at least one of the position, the attitude and the shape of the object, and a controller configured to obtain, an amount of regulation of the object by the regulating device, the amount of regulation being used for regulating a first optical characteristic value of the projection device expressed by a square root of a weighted square sum of wavefront aberration coefficients of light projected by the projection device, and to control the regulating device based on the amount of regulation.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile