The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 12, 2016
Filed:
Jan. 29, 2015
Brad Lemon, Battle Creek, MI (US);
Joseph Hirt, Cypress, TX (US);
Timothy Welling, Portage, MI (US);
James G. Daily, Iii, Marshall, MI (US);
David Meendering, Coldwater, MI (US);
Gary Rozak, Akron, OH (US);
Jerome O'grady, Hudson Village, OH (US);
Prabhat Kumar, Framingham, MA (US);
Steven A. Miller, Canton, MA (US);
Rong-chein Richard Wu, North Chelmsford, MA (US);
David G. Schwartz, Mentor, OH (US);
Brad Lemon, Battle Creek, MI (US);
Joseph Hirt, Cypress, TX (US);
Timothy Welling, Portage, MI (US);
James G. Daily, III, Marshall, MI (US);
David Meendering, Coldwater, MI (US);
Gary Rozak, Akron, OH (US);
Jerome O'Grady, Hudson Village, OH (US);
Prabhat Kumar, Framingham, MA (US);
Steven A. Miller, Canton, MA (US);
Rong-chein Richard Wu, North Chelmsford, MA (US);
David G. Schwartz, Mentor, OH (US);
H.C. Starck, Inc., Newton, MA (US);
Abstract
In various embodiments, tubular sputtering targets comprising molybdenum are provided and sputtered to produce thin films comprising molybdenum. The sputtering targets may be formed by forming a tubular billet having an inner diameter IDand an outer diameter OD, the formation comprising pressing molybdenum powder in a mold and sintering the pressed molybdenum powder, working the tubular billet to form a worked billet having an outer diameter ODsmaller than OD, and heat treating the worked billet. The sputtering targets may have a substantially uniform texture of (a) a 110 orientation parallel to a longitudinal direction and (b) a 111 orientation parallel to a radial direction.