The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 05, 2016

Filed:

Dec. 28, 2012
Applicants:

Xiaoxu Kang, Shanghai, CN;

Yuhang Zhao, Shanghai, CN;

Inventors:

Xiaoxu Kang, Shanghai, CN;

Yuhang Zhao, Shanghai, CN;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/146 (2006.01);
U.S. Cl.
CPC ...
H01L 27/14623 (2013.01); H01L 27/14621 (2013.01); H01L 27/14627 (2013.01); H01L 27/14629 (2013.01); H01L 27/14636 (2013.01); H01L 27/14645 (2013.01); H01L 27/14685 (2013.01); H01L 27/14689 (2013.01);
Abstract

A pixel structure of a CMOS image sensor pixel structure and a manufacturing method thereof. The structure comprises a photosensitive element () and a multi-layer structure of a standard CMOS device arranged on the silicon substrate (). A deep groove () having a light-transmitting space therein is formed above the photosensitive element, a side wall of the deep groove is surrounded by a light reflection shielding layer () continuously arranged in a longitudinal direction to reflect the light incident on the light reflection shielding layer. The side wall of the deep groove is surrounded by metal interconnects, vias, contact holes and polysilicon in annular configurations, thus the incident light on the deep grove is substantially completely reflected, which avoids the optical crosstalk and effectively improves the optical resolution and sensitivity of the pixel and the performance and reliability of the chip.


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