The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 05, 2016

Filed:

Dec. 18, 2013
Applicant:

Globalfoundries Singapore Pte. Ltd., Singapore, SG;

Inventors:

Wei Shao, Singapore, SG;

Fan Zhang, Singapore, SG;

Juan Boon Tan, Singapore, SG;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/4763 (2006.01); H01L 23/00 (2006.01); H01L 21/768 (2006.01); H01L 21/311 (2006.01); H01L 23/522 (2006.01); H01L 21/263 (2006.01);
U.S. Cl.
CPC ...
H01L 23/562 (2013.01); H01L 21/2633 (2013.01); H01L 21/31116 (2013.01); H01L 21/76805 (2013.01); H01L 21/76879 (2013.01); H01L 23/5226 (2013.01); H01L 2924/0002 (2013.01);
Abstract

Integrated circuits and methods for fabricating integrated circuits are provided. In one example, a method for fabricating an integrated circuit includes fabricating a crack-stop structure that extends through a plurality of metallization layers above a semiconductor substrate. The plurality of metallization layers includes a first metallization layer and a second metallization layer that overlies the first metallization layer. Fabricating the crack-stop structure includes forming a first via-bar overlying and coupled to a first metal line of the first metallization layer that is disposed in a first ILD layer of dielectric material. The first via-bar is disposed in a second ILD layer of dielectric material and has a first width. A second metal line of the second metallization layer that is in the second ILD layer is formed overlying and coupled to the first via-bar. The second metal line has a second width that is from about 1 to about 5 times the first width.


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