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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9305791 B1

PDFFull Text
Date of Patent:
Apr. 05, 2016

Filed:

Dec. 19, 2013

High productivity combinatorial workflow to screen and design chalcogenide materials as non volatile memory current selector

Applicant:

Intermolecular, Inc., San Jose, CA (US);

Inventor:

Imran Hashim, Saratoga, CA (US);

Assignee:

Intermolecular, Inc., San Jose, CA (US);

Attorney:
Primary Examiner:

Kevin M Picardat

Int. Cl.
CPC ...
H01L 21/8234 (2006.01); H01L 21/30 (2006.01); B08B 3/04 (2006.01); G11C 13/00 (2006.01); H01L 27/24 (2006.01); C23C 14/08 (2006.01); C23C 14/22 (2006.01); C23C 14/34 (2006.01); H01L 21/02 (2006.01); H01L 21/66 (2006.01); H01L 45/00 (2006.01); H01L 21/306 (2006.01); H01L 21/67 (2006.01); C23C 18/16 (2006.01); C25D 17/02 (2006.01); B01J 19/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/30 (2013.01); B01J 19/0046 (2013.01); B08B 3/04 (2013.01); C23C 14/08 (2013.01); C23C 14/22 (2013.01); C23C 14/34 (2013.01); C23C 18/1619 (2013.01); C23C 18/1682 (2013.01); C25D 17/02 (2013.01); G11C 13/0004 (2013.01); H01L 21/02104 (2013.01); H01L 21/30604 (2013.01); H01L 21/6719 (2013.01); H01L 21/67051 (2013.01); H01L 21/67057 (2013.01); H01L 22/10 (2013.01); H01L 22/12 (2013.01); H01L 22/14 (2013.01); H01L 27/2463 (2013.01); H01L 45/1608 (2013.01); B01J 2219/0038 (2013.01); B01J 2219/00283 (2013.01); B01J 2219/00286 (2013.01); B01J 2219/00301 (2013.01); B01J 2219/00313 (2013.01); B01J 2219/00382 (2013.01); B01J 2219/00416 (2013.01); B01J 2219/00418 (2013.01); B01J 2219/00527 (2013.01); B01J 2219/00585 (2013.01);
Abstract

Combinatorial workflow is provided for evaluating materials and processes for current selector devices in a cross point memory array. Blanket layers, metal-insulator-metal devices, and compete memory structures are combinatorially fabricated on multiple regions of a substrate, with each region having a different material and process condition for the current selector devices. The current selector devices are then characterized, and the data are compared to obtain the optimum materials and processes.

Find Patent Forward Citations

Hashim, Imran. (2016). High productivity combinatorial workflow to screen and design chalcogenide materials as non volatile memory current selector (U.S. Patent No. 9305791). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9305791

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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