The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 05, 2016
Filed:
Jan. 09, 2014
Applicant:
Tel Epion Inc., Billerica, MA (US);
Inventors:
Robert K. Becker, Danvers, MA (US);
Avrum Freytsis, Salem, MA (US);
Assignee:
TEL Epion Inc., Billerica, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/30 (2006.01); H01J 37/08 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3002 (2013.01); H01J 37/08 (2013.01); H01J 37/30 (2013.01); G21K 2201/00 (2013.01); H01J 2237/006 (2013.01); H01J 2237/061 (2013.01); H01J 2237/0812 (2013.01); Y10T 29/49769 (2015.01); Y10T 29/49826 (2015.01);
Abstract
A method of assembling a nozzle/skimmer module includes coupling a nozzle assembly and skimmer cartridge assembly in a rigid tandem configuration to more accurately control the formation of the Gas Cluster Ion Beam (GCIB). The nozzle/skimmer module is pre-aligned before installation in a production GCIB processing system to more accurately position the GCIB.