The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 05, 2016
Filed:
Feb. 22, 2012
Felix Godfried Peter Peeters, Heide, NL;
Jozef Petrus Henricus Benschop, Veldhoven, NL;
Michael Jozef Mathijs Renkens, Sittard, NL;
Gregor Edward Van Baars, Eindhoven, NL;
Jeroen Dekkers, Eindhoven, NL;
Felix Godfried Peter Peeters, Heide, NL;
Jozef Petrus Henricus Benschop, Veldhoven, NL;
Michael Jozef Mathijs Renkens, Sittard, NL;
Gregor Edward Van Baars, Eindhoven, NL;
Jeroen Dekkers, Eindhoven, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A radiation spot measurement system for a lithographic apparatus, the system having a target onto which a radiation system of the lithographic apparatus may project spots of radiation for a measurement process, the target having a measurement target. The system further includes a radiation detector to detect radiation from one of the spots, and a controller to receive information from the radiation detector and to determine the position of the spot of radiation relative to an intended position of the spot of radiation.