The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 05, 2016
Filed:
May. 03, 2013
Applicants:
Earl Jensen, Santa Clara, CA;
Christopher Kirk, Beaconsfield, GB;
Inventors:
Earl Jensen, Santa Clara, CA;
Christopher Kirk, Beaconsfield, GB;
Assignee:
KLA-Tencor Corporation, Milpitas, CA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/08 (2006.01); G01R 31/26 (2014.01); G01R 31/305 (2006.01); G01R 31/307 (2006.01);
U.S. Cl.
CPC ...
G01R 31/2601 (2013.01); G01R 31/305 (2013.01); G01R 31/307 (2013.01);
Abstract
Aspects of the present disclosure describe an inspection apparatus which performs inspection on a smaller field of a wafer with structures for current collection. The defective via holes may be located based on the collected current. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.