The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 29, 2016
Filed:
Apr. 30, 2015
International Business Machines Corporation, Armonk, NY (US);
James W. Adkisson, Jericho, VT (US);
Panglijen Candra, Essex Junction, VT (US);
Thomas J. Dunbar, Burlington, VT (US);
Mark D. Jaffe, Shelburne, VT (US);
Robert K. Leidy, Burlington, VT (US);
Anthony K. Stamper, Williston, VT (US);
GLOBALFOUNDRIES INC., Grand Cayman, KY;
Abstract
Tunable filter structures, methods of manufacture and design structures are disclosed. The method of forming a filter structure includes forming a piezoelectric resonance filter over a cavity structure. The forming of the piezoelectric resonance filter includes: forming an upper electrode on one side of a piezoelectric material; and forming a lower electrode on an opposing side of the piezoelectric material. The method further includes forming a micro-electro-mechanical structure (MEMS) cantilever beam at a location in which, upon actuation, makes contact with the piezoelectric resonance filter.