The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 29, 2016
Filed:
Oct. 12, 2011
Applicants:
Hidenori Miyamoto, Kawasaki, JP;
Tadahiko Hirakawa, Kawasaki, JP;
Koichi Misumi, Kawasaki, JP;
Inventors:
Assignee:
TOKYO OHKA KOGYO CO., LTD., Kawasaki-Shi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/18 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01); H01L 31/032 (2006.01); B05D 1/26 (2006.01);
U.S. Cl.
CPC ...
H01L 31/18 (2013.01); H01L 21/6715 (2013.01); H01L 21/6776 (2013.01); H01L 21/67173 (2013.01); H01L 31/0322 (2013.01); B05D 1/26 (2013.01); B05D 2252/02 (2013.01); B05D 2252/04 (2013.01); Y02E 10/541 (2013.01); Y02E 10/543 (2013.01); Y02P 70/521 (2015.11);
Abstract
A coating apparatus including a coating part which has a nozzle which ejects a liquid material including an oxidizable metal from a tip portion, and a relative driving unit which moves a substrate and the nozzle in relation to each other so that the tip portion passes through the substrate, such that at least the tip portion of the nozzle provides an affinity control part which is formed so that affinity between the affinity control part and the liquid material is less than that between the liquid materials.