The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 29, 2016
Filed:
Dec. 08, 2014
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventors:
Todd Dunn, Phoenix, AZ (US);
Fred Alokozai, Scottsdale, AZ (US);
Jerry Winkler, Gilbert, AZ (US);
Michael Halpin, Scottsdale, AZ (US);
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F27D 11/00 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01); F28D 15/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67103 (2013.01); F28D 15/00 (2013.01); H01L 21/67109 (2013.01); H01L 21/68714 (2013.01); H01L 21/68742 (2013.01);
Abstract
A wafer processing apparatus may include a susceptor having a top side and a backside, a susceptor heater having a spacing member and a heating member, a shim removably mounted between the susceptor and the susceptor heater, a cavity formed by the susceptor backside, the susceptor heater, and the shim, a fluid inlet communicating with the cavity, and a plurality of fluid outlets communicating with the cavity.
Published as: